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Synthesis, Characterization and Thermal Study of Divalent Germanium, Tin and Lead Triazenides for Atomic Layer Deposition

Rouzbeh Samii, David Zanders, Anton Fransson, Goran Bačić, Sean Barry, Lars Ojamäe, Vadim Kessler, Henrik Pedersen, Nathan O'Brien

Version 1 posted 09 March 2021

297

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Physical Chemistry

Working Paper

On the limitations of thermal atomic layer deposition of InN using ammonia

Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 06 December 2022

139

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Organometallic Chemistry

Working Paper

The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling ALD of InN Films

Polla Rouf, Nathan J O'Brien, Karl Rönnby, Rouzbeh Samii, Ivan G. Ivanov, Lars Ojamäe, Henrik Pedersen

Version 1 posted 19 June 2019

426

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Inorganic Chemistry

Working Paper

Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition

Rouzbeh Samii, David Zanders, Sydney Buttera, Vadim Kessler, Lars Ojamäe, Henrik Pedersen, Nathan O'Brien

Version 1 posted 01 December 2020

312

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Physical Chemistry

Working Paper

Kinetic Modeling of Ammonia Decomposition at CVD Conditions

Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 03 June 2020

1,050

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Theoretical and Computational Chemistry

Working Paper

Thermal Decomposition of Trimethylindium and Indium Trisguanidinate Precursors for InN Growth: An Ab-Initio and Kinetic Modelling Study

Giane Damas, Karl Rönnby, Henrik Pedersen, Lars Ojamäe

Version 1 posted 28 February 2023

184

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Inorganic Chemistry

Working Paper

Synthesis, Structure and Thermal Properties of Volatile Group 11 Triazenides as Potential Precursors for Vapor Deposition

Rouzbeh Samii, Anton Fransson, David Zanders, Atilla Varga, Sean Barry, Lars Ojamäe, Vadim Kessler, Nathan J. O'Brien

Version 1 posted 24 February 2022

199

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Materials Science

Working Paper

Controlled CVD growth of highly <111>-oriented 3C-SiC

Jing-Jia Huang, Christian Militzer, Charles Wijayawardhana, Urban Forsberg, Lars Ojamäe, Henrik Pedersen

Version 1 posted 23 February 2022

303

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Inorganic Chemistry

Working Paper

Reduction of carbon impurities in aluminium nitride from time-resolved chemical vapour deposition using trimethylaluminum

Polla Rouf, Pitsiri Sukkaew, Lars Ojamäe, Henrik Pedersen

Version 2 posted 11 May 2020

594

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Inorganic Chemistry

Working Paper

In-situ Activation of a Highly Volatile and Thermally Stable Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition

Nathan O'Brien, Polla Rouf, Rouzbeh Samii, Karl Rönnby, Sydney C. Buttera, Ivan G. Ivanov, Vadim Kessler, Lars Ojamäe, Henrik Pedersen

Version 1 posted 28 November 2019

516

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14 results in Lars Ojamäe in Authors: Lars Ojamäe

Synthesis, Characterization and Thermal Study of Divalent Germanium, Tin and Lead Triazenides for Atomic Layer Deposition

On the limitations of thermal atomic layer deposition of InN using ammonia

The Endocyclic Carbon Substituent of Guanidinate and Amidinate Precursors Controlling ALD of InN Films

Synthesis and Thermal Study of Hexacoordinated Aluminum(III) Triazenides for Use in Atomic Layer Deposition

Kinetic Modeling of Ammonia Decomposition at CVD Conditions

Thermal Decomposition of Trimethylindium and Indium Trisguanidinate Precursors for InN Growth: An Ab-Initio and Kinetic Modelling Study

Synthesis, Structure and Thermal Properties of Volatile Group 11 Triazenides as Potential Precursors for Vapor Deposition

Controlled CVD growth of highly <111>-oriented 3C-SiC

Reduction of carbon impurities in aluminium nitride from time-resolved chemical vapour deposition using trimethylaluminum

In-situ Activation of a Highly Volatile and Thermally Stable Indium(III) Triazenide Precursor for Epitaxial Growth of Indium Nitride by Atomic Layer Deposition

14 results in Authors: Lars Ojamäe